Thin Film Growth and Nano Fabrication
5-source metal MBE system
6-source metal MBE system
6-source semiconductor MBE system
Pulsed laser deposition system
Pulsed laser deposition system 2
Pulsed laser deposition system 3
4-source high-vacuum magnetron sputtering system
7-source ultra-high-vacuum magnetron sputtering system
3-source evaporator
ECR plasma etching machine
E-beam lithography
Photo lithography
Wire bonder
Rapid thermal annealing system
Arc furnace
Magnetic and Ferroelectric Characterization
Spin dynamics and polarized EL measurement system
Temperature-controlled vector magnetization measurement system
Temperature-controlled MOKE system
MOKE Microscope
Spin wave measurement system
Ferroelectric properties measurement system
Variable-temperature-controlled high-magnetic-filed magnetoresistance measurement system
Variable-temperature-controlled magnetoresistance measurement system
Femto-second Ti-sapphire laser
Thin-film X-ray diffractometer
Step profiler
Scanning Probe Microscope（AFM, MFM, PFM）
Department of Physics
Nagoya University
Furo-cho, Chikusa, Nagoya 464-8602, Japan
Office (Prof. Taniyama)：Science Hall Room #416
Phone：+81-52-789-2886
Office (Students)：Science Hall Room #418
Phone：+81-52-789-2870